Integrated photonics by 3D Microfabrication

The miniaturization of optical and optoelectronic components is decisive for enabling data communication and telecommunication as well as sensing and imaging applications. The realization of freeform lenses, mirrors and other novel designs by conventional micro-scale 3D printing lacks sufficient resolution and optical surface quality. Two-Photon Polymerization allows to print optically transparent microstructures with smooth surfaces along a lean process. The technology is not only used to fabricate microparts on plane substrates but also to directly print complex structures precisely on pre-existing patterns and topographies, e.g. on photonic integrated circuits, on optical fiber tips and on premanufactured wafers. This method enables miniaturization and assembly-free fabrication of optical interfaces with high-precision in-situ 3D microprinting on various materials, such as InP, SOI and Si₃N₄.

For example, it is used to print freeform microoptical components directly onto chips, enabling the connection of multiple fibers to a chip. The light in this case must be collected, redirected parallel to the chip plane and then transferred to a narrow waveguide. For this purpose, the inherent design freedom of Two-Photon Polymerization enables to combine elements such as a spherical lens to collect light from the fiber facet with a taper to transfer it into the waveguide.

Nanoscribe’s expertise in high precision 3D Microfabrication and more than a decade of experience in the field of integrated photonics resulted in Quantum X align, the best-in-class 3D printer with nanoprecision alignment system. This new two-photon lithography system enables microfabrication of freeform lenses on predefined positions of photonic components and platforms.

Our aligned 3D printing competence is also sought after in several innovative research projects, such as MiLiQuant, HandheldOCT and PHOENICS.