Once the polymer microstructure is printed, a liquid nanocomposite glass material is simply cast on top of the polymer template and solidified using UV light. Along the sacrificial template replication process, a thermal treatment ultimately turns the nanocomposite material into fused silica glass, molded to the shape of the 3D sacrificial microstructure. Within the thermal process, comprising a maximum temperature of 1,300 degrees Celsius, the sacrificial polymer structure is entirely removed, resulting in hollow micro-channels within the glass. The smallest fabricated channel realized in the research project features a diameter of approximately 7 micrometers. The precise out-of-plane channel guidance of the mixer clearly underlines the feasibility of complex glass designs.
The new manufacturing process for hollow microstructures in glass still needs to be further developed and brought to industrial market maturity. In addition to various polymers, ceramics and metals, glass could soon become another attractive material for Nanoscribe's microfabrication technology, in particular for highly-precise 3D microfluidic systems.